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Precision Fabrication of 2D Materials with the VINSE Helios FIB-SEM

SEM image of a Distributed Bragg Reflector cross-section ready for deposition.2D materials are a relatively new class of materials that can exhibit unique behavior because of their finite thickness. Classic processing approaches, like the Scotch™ tape method, take advantage of the weak Van der Waals forces between the layers, enabling the separation and deposition of 2D sheets onto a variety of surfaces. However, materials that do not naturally flake into sheets may also exhibit new and exciting physical behavior when confined to 2D. For these cases, the Helios FIB-SEM can fabricate thin (from microns to 100’s of nm) sections from bulk materials and deposit them onto another surface.

Emma Bartelsen, a graduate student in the Caldwell group, used FIB to prepare cross-sections of multilayer thin-film devices for infrared gas detection. Since their many layers lie beneath the surface, they are difficult to study from above. FIB cuts out a small section and turns it on its side, exposing the layers for scattering-type scanning near-field optical microscopy (s-SNOM). This preparation lets s-SNOM probe nanoscale electromagnetic-wave propagation through the structure, helping researchers understand and design future devices.

For more details on how Helios FIB-SEM could benefit your research, please contact VINSE cleanroom staff.